300 m2 clean room, which is divided in four different areas classified from class 100 to class 10000 assuring the environmental conditions for working at nanoscale.
It is equipped with state of art techniques for nano/micro scale sample fabrication, either with systems for high quality thin film growth or for nano and micro scale structure fabrication.
Electron beam nanolitography system - EBL
Nanofibers fabrication system,
Scientific equipment for coatings at nanometric scale of any material (magnetic, conductor, insulator).
Different techniques are available: thermal evaporation, sputtering plasma, electron beam ...
Coatings Characterization (nano/micro)
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